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The role of fabrication techniques on the performance of widely tunable micromachined capacitors (2004)
Journal Article
Gallant, A., & Wood, D. (2004). The role of fabrication techniques on the performance of widely tunable micromachined capacitors. Sensors and Actuators A: Physical, 110(1-3), 423-431. https://doi.org/10.1016/j.sna.2003.07.006

Coventorware 2001.1® is used to identify key vertical dimensions for the low voltage operation of a two-gap widely tunable capacitor. Using identical masking stages, two varieties of tunable capacitor are presented. Nickel structures are demonstrated... Read More about The role of fabrication techniques on the performance of widely tunable micromachined capacitors.