The simulation, fabrication and testing of widely tunable micromachined capacitors.
(2004)
Thesis
Gallant, A. (2004). The simulation, fabrication and testing of widely tunable micromachined capacitors. (Thesis). Durham University
All Outputs (3)
Sacrificial layers for widely tunable capacitors (2004)
Journal Article
Gallant, A., & Wood, D. (2004). Sacrificial layers for widely tunable capacitors. IEE proceedings. Science, measurement and technology, 151(2), 104-109
The role of fabrication techniques on the performance of widely tunable micromachined capacitors (2004)
Journal Article
Gallant, A., & Wood, D. (2004). The role of fabrication techniques on the performance of widely tunable micromachined capacitors. Sensors and Actuators A: Physical, 110(1-3), 423-431. https://doi.org/10.1016/j.sna.2003.07.006Coventorware 2001.1® is used to identify key vertical dimensions for the low voltage operation of a two-gap widely tunable capacitor. Using identical masking stages, two varieties of tunable capacitor are presented. Nickel structures are demonstrated... Read More about The role of fabrication techniques on the performance of widely tunable micromachined capacitors.