The role of fabrication techniques on the performance of widely tunable micromachined capacitors

Gallant, A.J.; Wood, D.

Abstract

Coventorware 2001.1® is used to identify key vertical dimensions for the low voltage operation of a two-gap widely tunable capacitor. Using identical masking stages, two varieties of tunable capacitor are presented. Nickel structures are demonstrated which have a tuning ratio of 5.1:1 from an initial capacitance of 0.7 pF. Gold devices exhibit a tuning ratio of 7.3:1 from an initial capacitance of 1.5 pF. These are the most widely tunable devices reported to date.

Citation

Gallant, A., & Wood, D. (2004). The role of fabrication techniques on the performance of widely tunable micromachined capacitors. Sensors and Actuators A: Physical, 110(1-3), 423-431. https://doi.org/10.1016/j.sna.2003.07.006

• Journal Article Type: Article
• Publication Date: 2004-02
• Deposit Date: Apr 23, 2008
• Journal: Sensors and Actuators A: Physical
• Print ISSN: 0924-4247
• Electronic ISSN: 1873-3069
• Publisher: Elsevier
• Peer Reviewed: Peer Reviewed
• Volume: 110
• Issue: 1-3
• Pages: 423-431
• DOI: https://doi.org/10.1016/j.sna.2003.07.006
• Keywords: RF-MEMS, Varactor, Pull-in, Electroplating, Tuning-range, MEMS.
• Public URL: https://durham-repository.worktribe.com/output/1561685