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Sacrificial layers for widely tunable capacitors

Gallant, AJ; Wood, D

Authors

D Wood



Citation

Gallant, A., & Wood, D. (2004). Sacrificial layers for widely tunable capacitors. IEE proceedings. Science, measurement and technology, 151(2), 104-109

Journal Article Type Article
Publication Date 2004-03
Journal IEE proceedings, Science, measurement and technology.
Print ISSN 1350-2344
Electronic ISSN 1359-7094
Publisher Institution of Engineering and Technology (IET)
Volume 151
Issue 2
Pages 104-109
Keywords STICTION; MEMS
Public URL https://durham-repository.worktribe.com/output/1585511