Professor Andrew Gallant a.j.gallant@durham.ac.uk
Professor
Sacrificial layers for widely tunable capacitors
Gallant, AJ; Wood, D
Authors
D Wood
Citation
Gallant, A., & Wood, D. (2004). Sacrificial layers for widely tunable capacitors. IEE proceedings. Science, measurement and technology, 151(2), 104-109
| Journal Article Type | Article |
|---|---|
| Publication Date | 2004-03 |
| Journal | IEE proceedings, Science, measurement and technology. |
| Print ISSN | 1350-2344 |
| Electronic ISSN | 1359-7094 |
| Publisher | Institution of Engineering and Technology (IET) |
| Volume | 151 |
| Issue | 2 |
| Pages | 104-109 |
| Keywords | STICTION; MEMS |
| Public URL | https://durham-repository.worktribe.com/output/1585511 |
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