Nanometer scale patterning using focused ion beam milling
(2005)
Journal Article
Petit, D., Faulkner, C., Johnstone, S., Wood, D., & Cowburn, R. (2005). Nanometer scale patterning using focused ion beam milling. Review of Scientific Instruments, 76(2), Article 026105. https://doi.org/10.1063/1.1844431
We report on the performance of focused ion beam (FIB) milling in order to produce nanometer scale devices. Resolution issues have been systematically studied as a function of emission current and working distance, by imaging single pixel lines FIB m... Read More about Nanometer scale patterning using focused ion beam milling.