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Application of a Desk-Side Double-Axis X-Ray Diffractometer for Very Large Area Epilayer Characterization. (1990)
Journal Article
Loxley, N., Bowen, D., & Tanner, B. (1990). Application of a Desk-Side Double-Axis X-Ray Diffractometer for Very Large Area Epilayer Characterization. MRS proceedings, 208, 119-124. https://doi.org/10.1557/proc-208-119

A new desk-side double-axis X-ray diffractometer capable of rapid, automatic measurement of lattice mismatch between epitaxial thin films and substrate in a two dimensional grid 150 mm square has been built. The design principles behind the five inde... Read More about Application of a Desk-Side Double-Axis X-Ray Diffractometer for Very Large Area Epilayer Characterization..