Non-Planar Photolithography Using Digital Holograms

McWilliam, R.; Purvis, A.; Johnson, S.; Maiden, A.; Williams, G.; Seed, L.; Ivey, P.

Abstract

A photolithographic process using digital holograms enables the fine-pitch patterning of grossly non-planar substrates, with many potential applications in microelectronics packaging. Considerations of hologram design, fabrication and verification particular to the lithographic process are presented.

Citation

McWilliam, R., Purvis, A., Johnson, S., Maiden, A., Williams, G., Seed, L., & Ivey, P. (2006, October). Non-Planar Photolithography Using Digital Holograms. Presented at Frontiers in Optics 2006 : Laser Science XXII, Rochester, New York

• Presentation Conference Type: Conference Paper (published)
• Conference Name: Frontiers in Optics 2006 : Laser Science XXII
• Start Date: Oct 8, 2006
• End Date: Oct 12, 2006
• Publication Date: 2006-10
• Deposit Date: Jan 29, 2007
• Publisher: Optical Society of America (OSA)
• Series Title: Frontiers in Optics
• Public URL: https://durham-repository.worktribe.com/output/1694696
• Publisher URL: http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2006-FWX6
• Additional Information: Conference dates: October 8-12, 2006.