SP Poland
External Linearization of a MEMS Electrothermal Scanner with Application in a Confocal Microscope.
Poland, SP; Girkin, JM; Li, Lijie; Uttamchandani, D
Citation
Poland, S., Girkin, J., Li, L., & Uttamchandani, D. (2009). External Linearization of a MEMS Electrothermal Scanner with Application in a Confocal Microscope. Micro and Nano Letters, 4, 106-111
| Journal Article Type | Article |
|---|---|
| Publication Date | 2009 |
| Deposit Date | Nov 8, 2011 |
| Journal | Micro and Nano Letters |
| Publisher | Institution of Engineering and Technology (IET) |
| Volume | 4 |
| Pages | 106-111 |
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