Holographic Lithography

Purvis, A.; Toriz-Garcia, H.; Cowling, J.J.; Williams, G.L.; Seed, N.L.; McWilliam, R.; Soulard, F.B.; Ivey, P.A.

Abstract

This review summarises the work of the Durham-Sheffield, UK team working on Holographic Lithography over the last decade. It collates progress in 3D resolution and overall scale of the substrate wiring patterns designed and considers a range of approaches and applications.

Citation

Purvis, A., Toriz-Garcia, H., Cowling, J., Williams, G., Seed, N., McWilliam, R., Soulard, F., & Ivey, P. (2014, July). Holographic Lithography. Presented at Imaging and Applied Optics 2014., Seattle, Washington, United States

• Presentation Conference Type: Conference Paper (published)
• Conference Name: Imaging and Applied Optics 2014.
• Start Date: Jul 13, 2014
• End Date: Jul 17, 2014
• Acceptance Date: Jan 1, 2014
• Publication Date: Jul 17, 2014
• Deposit Date: Jun 4, 2015
• Publicly Available Date: Feb 5, 2016
• Publisher: Optical Society of America (OSA)
• Book Title: Digital holography and three-dimensional imaging part of Imaging and applied optics 2014 ; 13-17 July 2014, Seattle, Washington, United States.
• DOI: https://doi.org/10.1364/dh.2014.dw1b.1
• Public URL: https://durham-repository.worktribe.com/output/1153339
• Additional Information: Conference dates: 13–17 July 2014