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Holographic Lithography

Purvis, A.; Toriz-Garcia, H.; Cowling, J.J.; Williams, G.L.; Seed, N.L.; McWilliam, R.; Soulard, F.B.; Ivey, P.A.

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Authors

H. Toriz-Garcia

J.J. Cowling

G.L. Williams

N.L. Seed

R. McWilliam

F.B. Soulard

P.A. Ivey



Abstract

This review summarises the work of the Durham-Sheffield, UK team working on Holographic Lithography over the last decade. It collates progress in 3D resolution and overall scale of the substrate wiring patterns designed and considers a range of approaches and applications.

Citation

Purvis, A., Toriz-Garcia, H., Cowling, J., Williams, G., Seed, N., McWilliam, R., Soulard, F., & Ivey, P. (2014, July). Holographic Lithography. Presented at Imaging and Applied Optics 2014., Seattle, Washington, United States

Presentation Conference Type Conference Paper (published)
Conference Name Imaging and Applied Optics 2014.
Start Date Jul 13, 2014
End Date Jul 17, 2014
Acceptance Date Jan 1, 2014
Publication Date Jul 17, 2014
Deposit Date Jun 4, 2015
Publicly Available Date Feb 5, 2016
Publisher Optical Society of America (OSA)
Book Title Digital holography and three-dimensional imaging part of Imaging and applied optics 2014 ; 13-17 July 2014, Seattle, Washington, United States.
DOI https://doi.org/10.1364/dh.2014.dw1b.1
Public URL https://durham-repository.worktribe.com/output/1153339
Additional Information Conference dates: 13–17 July 2014

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