The fabrication of THz photonic filters using ultraviolet based SU8 micromachining
(2006)
Conference Proceeding
Gallant, A., Levitt, J., Swift, G., Dai, D., Kaliteevski, M., Wood, D., …Chamberlain, J. (2006). The fabrication of THz photonic filters using ultraviolet based SU8 micromachining.
Here we report on the development of an ultraviolet (UV) based exposure technique for the fabrication of high aspect ratio metallic pillar arrays. These arrays act as photonic band gap based filters. Completed structures show a relative transmission... Read More about The fabrication of THz photonic filters using ultraviolet based SU8 micromachining.