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Arrays of nanoscale magnetic dots: Fabrication by x-ray interference lithography and characterization (2004)
Journal Article
Heyderman, L., Solak, H., David, C., Atkinson, D., Cowburn, R., & Nolting, F. (2004). Arrays of nanoscale magnetic dots: Fabrication by x-ray interference lithography and characterization. Applied Physics Letters, 85(21), 4989-4991. https://doi.org/10.1063/1.1821649

X-ray interference lithography (XIL) was employed in combination with electrodeposition to fabricate arrays of nanoscale nickel dots which are uniform over 40 µm and have periods down to 71 nm. Using extreme-ultraviolet light, XIL has the potential t... Read More about Arrays of nanoscale magnetic dots: Fabrication by x-ray interference lithography and characterization.