A robust, fine pitch probe card
(2009)
Journal Article
Rosamond, M., Gallant, A., & Wood, D. (2009). A robust, fine pitch probe card. Procedia chemistry, 1(1), 792-795. https://doi.org/10.1016/j.proche.2009.07.197
A new type of probe card is described which consists of inclined nickel cantilevers formed on top of a three dimensional PDMS layer. A prototype card has been built with an in-line pitch of 23 μm. The presence of a PDMS layer beneath the cantilevers... Read More about A robust, fine pitch probe card.