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Characterization of carbon nitride films grown using aninductively-coupled plasma with adamantane as the source hydrocarbon

Zeze, DA; O'Toole, EP; Crawford, RI; Cui, N; Anderson, CA; Brown, NMD

Authors

EP O'Toole

RI Crawford

N Cui

CA Anderson

NMD Brown



Citation

Zeze, D., O'Toole, E., Crawford, R., Cui, N., Anderson, C., & Brown, N. (1998). Characterization of carbon nitride films grown using aninductively-coupled plasma with adamantane as the source hydrocarbon. Surface and Interface Analysis, 26(12), 896-+

Journal Article Type Article
Publication Date 1998-11
Journal Surface and Interface Analysis
Print ISSN 0142-2421
Publisher Wiley
Peer Reviewed Peer Reviewed
Volume 26
Issue 12
Pages 896-+
Keywords carbon nitride films; inductively-coupled plasma deposition; adamantaneTHIN-FILMS; PHOTOELECTRON-SPECTROSCOPY; DEPOSITION; XPS