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Density, sp³ fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy

Ferrari, A.C.; Libassi, A.; Tanner, B.K.; Stolojan, V.; Yuan, J.; Brown, L.M.; Rodil, S.E.; Kleinsorge, B.; Robertson, J.

Authors

A.C. Ferrari

A. Libassi

V. Stolojan

J. Yuan

L.M. Brown

S.E. Rodil

B. Kleinsorge

J. Robertson



Citation

Ferrari, A., Libassi, A., Tanner, B., Stolojan, V., Yuan, J., Brown, L., …Robertson, J. (2000). Density, sp³ fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy. Physical Review B, 62, 11089-11103

Journal Article Type Article
Publication Date 2000
Journal Physical Review B
Print ISSN 2469-9950
Publisher American Physical Society
Volume 62
Pages 11089-11103
Public URL https://durham-repository.worktribe.com/output/1587807
Publisher URL http://adsabs.harvard.edu/cgi-bin/nph-bib_query?bibcode=2000PhRvB..6211089F&db_key=PHY



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