Y Miyajima
Surface induced bulk modifications of amorphous carbon nitride films bypost-deposition oxygen and hydrogen plasma treatment.
Miyajima, Y; Nitta, S; Silva, SRP; Zeze, DA
Citation
Miyajima, Y., Nitta, S., Silva, S., & Zeze, D. (2005). Surface induced bulk modifications of amorphous carbon nitride films bypost-deposition oxygen and hydrogen plasma treatment. Thin Solid Films, 491(1-2), 161-167
| Journal Article Type | Article |
|---|---|
| Publication Date | 2005-11 |
| Journal | Thin Solid Films |
| Print ISSN | 0040-6090 |
| Publisher | Elsevier |
| Volume | 491 |
| Issue | 1-2 |
| Pages | 161-167 |
| Keywords | amorphous carbon nitride; X-ray photoelectron spectroscopy; opticalproperties; sputteringTHIN-FILMS; DEPOSITION; XPS |
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