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Assessment Of Epitaxial Layers By Automated Scanning Double Axis Diffractometry

Halliwell, MAG; Lyons, MH; Tanner, BK; Ilczyszyn, P

Authors

MAG Halliwell

MH Lyons

P Ilczyszyn



Citation

Halliwell, M., Lyons, M., Tanner, B., & Ilczyszyn, P. (1983). Assessment Of Epitaxial Layers By Automated Scanning Double Axis Diffractometry. Journal of Crystal Growth, 65, 672-678

Journal Article Type Article
Publication Date 1983
Journal Journal of Crystal Growth
Print ISSN 0022-0248
Publisher Elsevier
Volume 65
Pages 672-678