Professor Dagou Zeze d.a.zeze@durham.ac.uk
Professor
Investigation of the uniformity and coverage of CxNy : H overcoatingsduring PECVD in an inductively coupled plasma
Zeze, DA; North, DR; Brown, NMD; Anderson, CA
Authors
DR North
NMD Brown
CA Anderson
Citation
Zeze, D., North, D., Brown, N., & Anderson, C. (2000). Investigation of the uniformity and coverage of CxNy : H overcoatingsduring PECVD in an inductively coupled plasma. Surface and Interface Analysis, 29(3), 201-207
| Journal Article Type | Article |
|---|---|
| Publication Date | 2000-03 |
| Journal | Surface and Interface Analysis |
| Print ISSN | 0142-2421 |
| Publisher | Wiley |
| Peer Reviewed | Peer Reviewed |
| Volume | 29 |
| Issue | 3 |
| Pages | 201-207 |
| Keywords | AES; XPS; SEM; Raman; CNCARBON NITRIDE FILMS; SPECTROSCOPY; GRAPHITE |
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