NF Za’bah
Top-down fabrication of single crystal silicon nanowire using optical lithography
Za’bah, NF; Kelvin, SKK; Bowen, L; Mendis, B; O'Neill, A
Citation
Za’bah, N., Kelvin, S., Bowen, L., Mendis, B., & O'Neill, A. (2012). Top-down fabrication of single crystal silicon nanowire using optical lithography. Journal of Applied Physics, 112(2), https://doi.org/10.1063/1.4737463
| Journal Article Type | Article |
|---|---|
| Publication Date | 2012 |
| Deposit Date | Mar 27, 2013 |
| Journal | Journal of Applied Physics |
| Print ISSN | 0021-8979 |
| Electronic ISSN | 1089-7550 |
| Publisher | American Institute of Physics |
| Volume | 112 |
| Issue | 2 |
| DOI | https://doi.org/10.1063/1.4737463 |
| Public URL | https://durham-repository.worktribe.com/output/1481773 |