Holographic Photolithography for 3D Integration

Williams, G.; Toriz-Garcia, J.; McWilliam, R.; Seed, L.; Purvis, A.; Ivey, P.

Holographic Photolithography for 3D Integration

Williams, G.; Toriz-Garcia, J.; McWilliam, R.; Seed, L.; Purvis, A.; Ivey, P.

Authors

G. Williams

J. Toriz-Garcia

R. McWilliam

L. Seed

Professor Alan Purvis alan.purvis@durham.ac.uk
College Mentor

P. Ivey

Contributors

Giovanni De Micheli
Editor

Citation

Williams, G., Toriz-Garcia, J., McWilliam, R., Seed, L., Purvis, A., & Ivey, P. (2010, March). Holographic Photolithography for 3D Integration. Presented at Design, Automation & Test in Europe (DATE) 2010, Dresden, Germany

Presentation Conference Type	Conference Paper (published)
Conference Name	Design, Automation & Test in Europe (DATE) 2010
Publication Date	2010-03
Deposit Date	Sep 22, 2010
Book Title	Proceedings, Design, Automation, & Test in Europe : Dresden, Germany, March 8-12, 2010 /
Public URL	https://durham-repository.worktribe.com/output/1158693
Publisher URL	http://www.date-conference.com/date10/