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Vertical tracks on the sidewall of a silicon die using 3D holographic photolithography (2011)
Journal Article
Toriz-Garcia, J., Williams, G., McWilliam, R., Seed, N., Purvis, A., Soulard, F., …Ivey, P. (2011). Vertical tracks on the sidewall of a silicon die using 3D holographic photolithography. Journal of Micromechanics and Microengineering, 21(8), Article 085034. https://doi.org/10.1088/0960-1317/21/8/085034

We describe the patterning of multiple 10 µm wide conductive tracks down the vertical sidewall of a 500 µm thick silicon die. A novel photolithographic technique is used, which utilizes a computer-generated hologram mask in conjunction with a diffrac... Read More about Vertical tracks on the sidewall of a silicon die using 3D holographic photolithography.

Three-dimensional holographic lithography by an iterative algorithm (2011)
Journal Article
Cowling, J., Williams, G., Purvis, A., McWilliam, R., Toriz-Garcia, J., Seed, N., …Ivey, P. (2011). Three-dimensional holographic lithography by an iterative algorithm. Optics Letters, 36(13), 2495-2497. https://doi.org/10.1364/ol.36.002495

We have applied an iterative algorithm for hologram design with multiple output image planes arranged in close proximity to create continuous patterns within an imaging volume. These holograms have been designed for photolithography on three-dimensio... Read More about Three-dimensional holographic lithography by an iterative algorithm.