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Outputs (4)

Sub-Micron 3d Holographic Lithography (2009)
Patent
Purvis, A., McWilliam, R., Curry, R., Andrew, M., Williams, G., Seed, L., …Ivey, P. (2009). Sub-Micron 3d Holographic Lithography

High fidelity microlithography patterning using computer generated holograms (2009)
Presentation / Conference Contribution
McWilliam, R., Purvis, A., Williams, G. L., Toritz-Garcia, J., Seed, L. N., & Ivey, P. A. (2009, April). High fidelity microlithography patterning using computer generated holograms. Presented at Digital holography and three-dimensional Imaging (DH), Vancouver

We investigate the achievable fidelity of line patterns produced by iterative and analytically derived computer generated holographic photomasks for the fabrication of microelectronic circuits by photolithographic exposure. Metrics for comparison are... Read More about High fidelity microlithography patterning using computer generated holograms.

Model and Application of the Community Effect. (2009)
Presentation / Conference Contribution
Jones, D., Purvis, A., & McWilliam, R. (2009, March). Model and Application of the Community Effect. Presented at UK Synthetic Biology, Systems Biology and Bioinformatics 2009, University of Cambridge, Cambridge, England