A field programmable gate array based Langmuir probe system for measurement of plasma parameters at 500 kHz in a high-power impulse magnetron sputtering plasma.
(2024)
Journal Article
Hickling, C. J., Hall, S., Harrison, J. R., Sharples, R., & Bradley, J. W. (2024). A field programmable gate array based Langmuir probe system for measurement of plasma parameters at 500 kHz in a high-power impulse magnetron sputtering plasma. Review of Scientific Instruments, 95(3), Article 033503. https://doi.org/10.1063/5.0174458
By utilizing Field Programmable Gate Arrays in a configuration similar to that of the Mirror Langmuir Probe, it is possible to bias a single probe at three precise voltages in sequence. These voltages can be dynamically adjusted in real-time based on... Read More about A field programmable gate array based Langmuir probe system for measurement of plasma parameters at 500 kHz in a high-power impulse magnetron sputtering plasma..