A field programmable gate array based Langmuir probe system for measurement of plasma parameters at 500 kHz in a high-power impulse magnetron sputtering plasma.

Hickling, C J; Hall, S; Harrison, J R; Sharples, R; Bradley, J W

Abstract

By utilizing Field Programmable Gate Arrays in a configuration similar to that of the Mirror Langmuir Probe, it is possible to bias a single probe at three precise voltages in sequence. These voltages can be dynamically adjusted in real-time based on the measured plasma electron temperature to ensure the transition region is always sampled. The first results have been obtained by employing this method and have generated real-time outputs of electron temperature, ion saturation current, and floating potential on a low temperature pulsed-DC magnetron at 500 kHz. These results are in good agreement with the analysis of a conventionally swept Langmuir probe. This probe is designed with the intention of being implemented on MAST-U to aid in the study of exhaust physics and enable further investigation into filamentary behavior. [Abstract copyright: © 2024 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).]

Citation

Hickling, C. J., Hall, S., Harrison, J. R., Sharples, R., & Bradley, J. W. (2024). A field programmable gate array based Langmuir probe system for measurement of plasma parameters at 500 kHz in a high-power impulse magnetron sputtering plasma. Review of Scientific Instruments, 95(3), Article 033503. https://doi.org/10.1063/5.0174458

• Journal Article Type: Article
• Acceptance Date: Feb 12, 2024
• Online Publication Date: Mar 18, 2024
• Publication Date: Mar 1, 2024
• Deposit Date: May 14, 2024
• Publicly Available Date: May 15, 2024
• Journal: Review of Scientific Instruments
• Print ISSN: 0034-6748
• Publisher: American Institute of Physics
• Peer Reviewed: Peer Reviewed
• Volume: 95
• Issue: 3
• Article Number: 033503
• DOI: https://doi.org/10.1063/5.0174458
• Public URL: https://durham-repository.worktribe.com/output/2378882