Raman and finite-element analysis of a mechanically strained silicon microstructure

Bowden, M.; Gardiner, D.J.; Wood, D.; Burdess, J.; Harris, A.; Hedley, J.

doi:10.1088/0960-1317/11/1/302

All Outputs (42)

Physics : oxygen drips upwards from superconductors (2002)
Journal Article
Wood, D., Greener, V., & Hampshire, D. (2002). Physics : oxygen drips upwards from superconductors. Nature, 415(6874), 860-860. https://doi.org/10.1038/415860a

Raman and finite-element analysis of a mechanically strained silicon microstructure (2001)
Journal Article
Bowden, M., Gardiner, D., Wood, D., Burdess, J., Harris, A., & Hedley, J. (2001). Raman and finite-element analysis of a mechanically strained silicon microstructure. Journal of Micromechanics and Microengineering, 11(1), 7-12. https://doi.org/10.1088/0960-1317/11/1/302

Raman microspectroscopy has been used to determine the volumetric micro-strain distribution in mechanically stressed silicon microstructures. Data are presented as strain images with a spatial resolution of around 0.8 µm. A useful correlation is demo... Read More about Raman and finite-element analysis of a mechanically strained silicon microstructure.