A photolithographic process for grossly non-planar substrates.

Williams, Gavin L.; McWilliam, Richard; Toriz-Garcia, Jesus; Curry, Richard; Maiden, Andrew; Seed, Luke N.; Purvis, Alan; Ivey, Peter A.

Gavin L. Williams

Richard McWilliam

Jesus Toriz-Garcia

Richard Curry

Andrew Maiden

Luke N. Seed

Professor Alan Purvis alan.purvis@durham.ac.uk
College Mentor

Peter A. Ivey

Frank M. Schellenberg
Editor

Presentation Conference Type	Conference Paper (Published)
Conference Name	Advanced Lithography
Publication Date	2008-03
Volume	6921
Series Title	Emerging Lithographic Technologies
Series ISSN	0277-786X
Edition	XII
Keywords	lithography, optics, holography
Public URL	https://durham-repository.worktribe.com/output/1694460
Publisher URL	http://spiedigitallibrary.aip.org/dbt/dbt.jsp?KEY=PSISDG&Volume=6921&Issue=1&bproc=symp&scode=AL08

Holographic Lithography (2014)
Presentation / Conference Contribution