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A Grazing-incidence X-ray Reflectometer For Rapid Nondestructive Characterization Of Thin-films And Interfaces

Loxley, N; Monteiro, A; Cooke, ML; Bowen, DK; Tanner, BK

Authors

N Loxley

A Monteiro

ML Cooke

DK Bowen



Contributors

S.J. Pearton
Editor

D.K. Sadana
Editor

J.M. Zavada
Editor

Citation

Loxley, N., Monteiro, A., Cooke, M., Bowen, D., & Tanner, B. (1992, December). A Grazing-incidence X-ray Reflectometer For Rapid Nondestructive Characterization Of Thin-films And Interfaces. Presented at Symposium of Advanced III-V Compound Semiconductor Growth, Processing and Device., Boston

Presentation Conference Type Conference Paper (published)
Conference Name Symposium of Advanced III-V Compound Semiconductor Growth, Processing and Device.
Publication Date 1992
Publisher Materials Research Society
Volume 240
Pages 219-224
DOI https://doi.org/10.1557/proc-240-219
Public URL https://durham-repository.worktribe.com/output/1680733