M.D. Cooke
Comparison of simple low-energy ion sources for direct deposition of submicron structures
Cooke, M.D.; Atkinson, D.; Hibbert, M.; Xiong, G.; Allwood, D.A.; Cowburn, R.P.
Authors
Professor Del Atkinson del.atkinson@durham.ac.uk
Professor
M. Hibbert
G. Xiong
D.A. Allwood
R.P. Cowburn
Citation
Cooke, M., Atkinson, D., Hibbert, M., Xiong, G., Allwood, D., & Cowburn, R. (2003). Comparison of simple low-energy ion sources for direct deposition of submicron structures. Nanotechnology, 14, 416-422
| Journal Article Type | Article |
|---|---|
| Publication Date | 2003 |
| Journal | Nanotechnology |
| Print ISSN | 0957-4484 |
| Publisher | IOP Publishing |
| Volume | 14 |
| Pages | 416-422 |
| Publisher URL | http://adsabs.harvard.edu/cgi-bin/nph-bib_query?bibcode=2003Nanot..14..416C&db_key=PHY |
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