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X-ray diffraction imaging of dislocation generation related to microcracks in Si wafers

Wittge, J; Danilewsky, A; Allen, D; McNally, P; Li, ZJ; Baumbach, T; Gorostegui-Colinas, E; Garagorri, J; Elizalde, MR; Jacques, D; Fossati, MC; Bowen, DK; Tanner, BK

Authors

J Wittge

A Danilewsky

D Allen

P McNally

ZJ Li

T Baumbach

E Gorostegui-Colinas

J Garagorri

MR Elizalde

D Jacques

MC Fossati

DK Bowen



Citation

Wittge, J., Danilewsky, A., Allen, D., McNally, P., Li, Z., Baumbach, T., …Tanner, B. (2010). X-ray diffraction imaging of dislocation generation related to microcracks in Si wafers. Powder Diffraction, 25(2), 99-103. https://doi.org/10.1154/1.3392369

Journal Article Type Article
Publication Date 2010-06
Deposit Date Jun 24, 2011
Journal Powder Diffraction
Print ISSN 0885-7156
Electronic ISSN 1945-7413
Publisher Cambridge University Press
Volume 25
Issue 2
Pages 99-103
DOI https://doi.org/10.1154/1.3392369
Keywords X-ray diffraction imaging; topography; dislocation sourceSILICON; TOPOGRAPHY
Public URL https://durham-repository.worktribe.com/output/1508250



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