Xiaofeng Lu
Highly Reproducible Nanolithography by Dynamic Plough of an Atomic-Force Microscope Tip and Thermal-Annealing Treatment.
Lu, Xiaofeng; Balocco, Claudio; Yang, Fuhua; Song, Aimin M.
Citation
Lu, X., Balocco, C., Yang, F., & Song, A. M. (2012). Highly Reproducible Nanolithography by Dynamic Plough of an Atomic-Force Microscope Tip and Thermal-Annealing Treatment. Computer, 10(1), 53-58. https://doi.org/10.1109/c-m.1977.217498
Journal Article Type | Article |
---|---|
Publication Date | 2012 |
Deposit Date | Nov 10, 2011 |
Journal | Computer |
Print ISSN | 0018-9162 |
Electronic ISSN | 1558-0814 |
Publisher | Institute of Electrical and Electronics Engineers |
Peer Reviewed | Peer Reviewed |
Volume | 10 |
Issue | 1 |
Pages | 53-58 |
DOI | https://doi.org/10.1109/c-m.1977.217498 |
Public URL | https://durham-repository.worktribe.com/output/1503478 |
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