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Research Repository

Highly Reproducible Nanolithography by Dynamic Plough of an Atomic-Force Microscope Tip and Thermal-Annealing Treatment.

Lu, Xiaofeng; Balocco, Claudio; Yang, Fuhua; Song, Aimin M.

Authors

Xiaofeng Lu

Professor Claudio Balocco claudio.balocco@durham.ac.uk
Professor

Fuhua Yang

Aimin M. Song

Journal Article Type	Article
Publication Date	2012
Deposit Date	Nov 10, 2011
Journal	Computer
Print ISSN	0018-9162
Publisher	Institute of Electrical and Electronics Engineers
Peer Reviewed	Peer Reviewed
Volume	10
Issue	1
Pages	53-58
DOI	https://doi.org/10.1109/c-m.1977.217498
Public URL	https://durham-repository.worktribe.com/output/1503478

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