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Electron energy loss spectroscopy of nano-scale CrAlYN/CrN-CrAlY(O)N/Cr(O)N multilayer coatings deposited by unbalanced magnetron sputtering

Ross, IM; Rainforth, WM; Seabourne, CR; Scott, AJ; Wang, P; Mendis, BG; Bleloch, AL; Reinhard, C; Hovsepian, PE

Authors

IM Ross

WM Rainforth

CR Seabourne

AJ Scott

P Wang

AL Bleloch

C Reinhard

PE Hovsepian



Citation

Ross, I., Rainforth, W., Seabourne, C., Scott, A., Wang, P., Mendis, B., …Hovsepian, P. (2010). Electron energy loss spectroscopy of nano-scale CrAlYN/CrN-CrAlY(O)N/Cr(O)N multilayer coatings deposited by unbalanced magnetron sputtering. Thin Solid Films, 518(18), 5121-5127. https://doi.org/10.1016/j.tsf.2010.03.012

Journal Article Type Article
Publication Date 2010
Deposit Date Jan 30, 2012
Journal Thin Solid Films
Print ISSN 0040-6090
Publisher Elsevier
Peer Reviewed Peer Reviewed
Volume 518
Issue 18
Pages 5121-5127
DOI https://doi.org/10.1016/j.tsf.2010.03.012
Public URL https://durham-repository.worktribe.com/output/1487208



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