Skip to main content

Research Repository

Advanced Search

Tilting micromirror platform based on liquid dielectrophoresis

Frozanpoor, Iman; Cooke, Michael; Alvarez-Ruiz, Diana; Ambukan, Vibin; Gallant, Andrew; Balocco, Claudio

Tilting micromirror platform based on liquid dielectrophoresis Thumbnail


Iman Frozanpoor

Diana Alvarez-Ruiz

Vibin Ambukan


This study presents an electrically actuated tilting micro platform based on liquid dielectrophoresis with three axes movement using three droplets situated 120° apart from each other. The interdigitated electrodes produce a non-uniform electric field that generates a body force. The dielectrophoretic mechanism is responsive within at least 30 ms, and it eliminates the solid-solid contact. The tilting platform enabled an angular coverage up to 0.9° (±0.02°), with a maximum displacement of 120 µm. The tilting micromirror platform has beam steering characteristics suitable for various optical applications. The actuating platform sensor is a cost-effective and simple alternative method to study liquid dielectrophoresis without measuring the droplet contact angle. Furthermore, the unique configuration without any solid-solid contact offers a potential improvement for applications in optics, actuators, and other conventional microelectromechanical systems.


Frozanpoor, I., Cooke, M., Alvarez-Ruiz, D., Ambukan, V., Gallant, A., & Balocco, C. (2021). Tilting micromirror platform based on liquid dielectrophoresis. Sensors and Actuators A: Physical, 332(2), Article 113177.

Journal Article Type Article
Acceptance Date Oct 12, 2021
Online Publication Date Dec 7, 2021
Publication Date Dec 1, 2021
Deposit Date Nov 12, 2021
Publicly Available Date Nov 25, 2021
Journal Sensors and Actuators A: Physical
Print ISSN 0924-4247
Publisher Elsevier
Peer Reviewed Peer Reviewed
Volume 332
Issue 2
Article Number 113177
Public URL


You might also like

Downloadable Citations