Simple de-embedding and simulation technique to find permittivity with a THz vector network analyser

Hammler, J.; Gallant, A.J.; Balocco, C.

Abstract

A simple and fast method for measuring the dielectric constant with a THz vector network analyser (VNA) has been developed. A numeric de-embedding technique removes free-space propagation effects, then simulation of Maxwell's equations simultaneously fits both permittivity and thickness to measured scattering parameters. Results are presented for semiconductor and dielectric samples within the frequency range 750 GHz to 1.1 THz, showing excellent agreement with prior work. A statistical analysis of uncertainty is performed, which demonstrates the robustness of our method.

Citation

Hammler, J., Gallant, A., & Balocco, C. (2015, August). Simple de-embedding and simulation technique to find permittivity with a THz vector network analyser. Presented at 2015 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz), Hong Kong, China

• Presentation Conference Type: Conference Paper (published)
• Conference Name: 2015 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz)
• Start Date: Aug 23, 2015
• End Date: Aug 28, 2015
• Acceptance Date: Aug 23, 2015
• Publication Date: Aug 23, 2015
• Deposit Date: Dec 7, 2015
• Publicly Available Date: Jan 26, 2016
• Publisher: Institute of Electrical and Electronics Engineers
• Pages: 1-2
• Series Title: IEEE Conference Proceedings
• Book Title: 40th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 23-28 August 2015, Hong Kong.
• DOI: https://doi.org/10.1109/irmmw-thz.2015.7327822
• Keywords: Frequency measurement, Permittivity, Permittivity measurement, Scattering parameters, Semiconductor device measurement, Thickness measurement.
• Public URL: https://durham-repository.worktribe.com/output/1152088
• Additional Information: Date of Conference: 23-28 August 2015