Nanofabrication using nanotranslated stencil masks and lift off
(2004)
Journal Article
Racz, Z., He, J., Srinivasan, S., Zhao, W., Seabaugh, A., Han, K., …Wolfe, J. (2004). Nanofabrication using nanotranslated stencil masks and lift off. Journal of Vacuum Science and Technology B, 22(1), 74-76. https://doi.org/10.1116/1.1637916
We propose and demonstrate a technique for forming nanometer-scale metal features based on evaporation onto a substrate through a stencil mask. In this work, the stencil mask is laterally translated by a piezoflexure stage, between evaporations of di... Read More about Nanofabrication using nanotranslated stencil masks and lift off.