Outputs (3)

Photolithographic Patterning of Bi-Helical Tracks onto Conical Substrates (2007)
Journal Article
Purvis, A., McWilliam, R., Johnson, S., Seed, N., Williams, G., Maiden, A., & Ivey, P. (2007). Photolithographic Patterning of Bi-Helical Tracks onto Conical Substrates. Journal of Micro/Nanopatterning, Materials, and Metrology, 6(4), https://doi.org/10.1117/1.2824377

We demonstrate the direct photolithographic patterning of a grossly non-planar substrate by creating 62 micron helical tracks on a 22 mm high cone. The projection of focused light on to the three dimensional surface is achieved using a computer gener... Read More about Photolithographic Patterning of Bi-Helical Tracks onto Conical Substrates.

Non-Planar Photolithography Using Digital Holograms (2006)
Presentation / Conference Contribution
McWilliam, R., Purvis, A., Johnson, S., Maiden, A., Williams, G., Seed, L., & Ivey, P. (2006). Non-Planar Photolithography Using Digital Holograms.

A photolithographic process using digital holograms enables the fine-pitch patterning of grossly non-planar substrates, with many potential applications in microelectronics packaging. Considerations of hologram design, fabrication and verification pa... Read More about Non-Planar Photolithography Using Digital Holograms.

Nonplanar photolithography with computer-generated holograms (2005)
Journal Article
Maiden, A., McWilliam, R., Purvis, A., Johnson, S., Williams, G., Seed, N., & Ivey, P. (2005). Nonplanar photolithography with computer-generated holograms. Optics Letters, 30(11), 1300-1302. https://doi.org/10.1364/ol.30.001300

We outline a method for accomplishing photolithography on grossly nonplanar substrates. First we compute an approximation of the diffraction pattern that will produce the desired light-intensity distribution on the substrate to be patterned. This pat... Read More about Nonplanar photolithography with computer-generated holograms.