A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment
(2021)
Journal Article
Li, P., Zhang, D., Lennox, B., & Arvin, F. (2021). A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment. Mechanical Systems and Signal Processing, 155, Article 107603. https://doi.org/10.1016/j.ymssp.2020.107603
In this paper, a novel 3-degree-of-freedom (DOF) nanopositioner was investigated in order to position objects with nanometer scale accuracy. Nanopositioners are used in a variety of real-world applications, e.g. biomedical technology and nanoassembly... Read More about A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment.