Increased Mobility in 4H-SiC MOSFETs by Means of Hydrogen Annealing
(2022)
Journal Article
Idris, M. I., & Horsfall, A. (2022). Increased Mobility in 4H-SiC MOSFETs by Means of Hydrogen Annealing. Crystals, 12(8), Article 1111. https://doi.org/10.3390/cryst12081111
Enhancement-mode 4H-SiC MOSFETs utilising an aluminium oxide (Al2O3) dielectric without the requirement for an underlying silicon oxide (SiO2) layer have been shown to have a field effect mobility of 150 cm2V−1s−1 and a subthreshold swing of 160 mV/d... Read More about Increased Mobility in 4H-SiC MOSFETs by Means of Hydrogen Annealing.