Comparison of CxNy : H films obtained by deposition using magnetronsputtering or an inductively coupled plasma
(2000)
Journal Article
Zeze, D., North, D., Brown, N., & Anderson, C. (2000). Comparison of CxNy : H films obtained by deposition using magnetronsputtering or an inductively coupled plasma. Surface and Interface Analysis, 29(6), 369-376
Professor Dagou Zeze's Outputs (2)
Investigation of the uniformity and coverage of CxNy : H overcoatingsduring PECVD in an inductively coupled plasma (2000)
Journal Article
Zeze, D., North, D., Brown, N., & Anderson, C. (2000). Investigation of the uniformity and coverage of CxNy : H overcoatingsduring PECVD in an inductively coupled plasma. Surface and Interface Analysis, 29(3), 201-207