Manipulation of exposure dose parameters to improve production of high aspect ratio structures using SU-8
(2012)
Journal Article
Daunton, R., Gallant, A., & Wood, D. (2012). Manipulation of exposure dose parameters to improve production of high aspect ratio structures using SU-8. Journal of Micromechanics and Microengineering, 22(7), Article 075016. https://doi.org/10.1088/0960-1317/22/7/075016
The detailed consideration of the chemistry occurring during the fabrication process is very important for SU-8 compared to other photoresists. In SU-8, the solvent does far more than just act as a carrier for the photoactive compounds: it plays a pr... Read More about Manipulation of exposure dose parameters to improve production of high aspect ratio structures using SU-8.