Micromachined Devices for Use in Terahertz Applications

Wood, D.; Chamberlain, M.; Baragwanath, A.; Dodd, L.E.; Hill, C.K.A.; Gallant, A.J.

doi:10.4028/www.scientific.net/ast.81.20

All Outputs (2)

Controlled reactive ion etching and plasma regrowth of titanium oxides of known thickness for production of metal-oxide-metal diodes (2013)
Journal Article

The successful production, via two different oxidation processes, of metal-oxide-metal (MOM) diodes is presented. An innovative reactive ion etching and plasma assisted regrowth process has been used to provide oxides, which are in the thickness rang... Read More about Controlled reactive ion etching and plasma regrowth of titanium oxides of known thickness for production of metal-oxide-metal diodes.

Micromachined Devices for Use in Terahertz Applications (2013)
Journal Article

Here we present results from key aspects of our interest in using micromachined devices in the THz region. First, our early work on making filters from rods of gold-coated SU8 is described. Pass (up to 97%) and stop bands can be observed which are th... Read More about Micromachined Devices for Use in Terahertz Applications.