Holographic Lithography
(2004)
Patent
Purvis, A., McWilliam, R., Seed, N., Williams, G., Ivey, P., Maiden, A., & Johnson, S. (2006). Holographic Lithography. WO2006021818
Method of generating a holographic diffraction pattern and a holographic lithography system are disclosed, the method comprising the steps of: defining at least one geometrical shape; generating at least one line segment to represent the at least one... Read More about Holographic Lithography.