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The modelling and fabrication of widely tunable capacitors

Gallant, AJ; Wood, D

Authors

D Wood



Citation

Gallant, A., & Wood, D. (2003). The modelling and fabrication of widely tunable capacitors. Journal of Micromechanics and Microengineering, 13(4), S178-S182

Journal Article Type Article
Publication Date 2003-07
Journal Journal of Micromechanics and Microengineering
Print ISSN 0960-1317
Electronic ISSN 1361-6439
Publisher IOP Publishing
Volume 13
Issue 4
Pages S178-S182
Keywords RANGE; MEMS
Public URL https://durham-repository.worktribe.com/output/1593578