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Contrast of device structures in X-ray section topographs

Holland, A.J.; Tanner, B.K.

Authors

A.J. Holland



Citation

Holland, A., & Tanner, B. (1993). Contrast of device structures in X-ray section topographs. Journal of Physics D: Applied Physics, 26, A137-A141

Journal Article Type Article
Publication Date 1993
Journal Journal of Physics D Applied Physics
Print ISSN 0022-3727
Electronic ISSN 1361-6463
Publisher IOP Publishing
Volume 26
Pages A137-A141
Public URL https://durham-repository.worktribe.com/output/1587577
Publisher URL http://adsabs.harvard.edu/cgi-bin/nph-bib_query?bibcode=1993JPhD...26A.137H&db_key=PHY