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Solvent-free polymer lithography via the Kirkendall effect

Thompson, RL

Authors



Citation

Thompson, R. (2010). Solvent-free polymer lithography via the Kirkendall effect. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 268(11-12), 2181-2184. https://doi.org/10.1016/j.nimb.2010.02.083

Journal Article Type Article
Publication Date 2010
Deposit Date Feb 6, 2012
Journal Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Print ISSN 0168-583X
Electronic ISSN 1872-9584
Publisher Elsevier
Volume 268
Issue 11-12
Pages 2181-2184
DOI https://doi.org/10.1016/j.nimb.2010.02.083
Public URL https://durham-repository.worktribe.com/output/1483753