Traceable interferometry using binary reconfigurable holograms

Cashmore, M.T.; Hall, S.R.G.; Love, G.D.

Abstract

We describe the characterization of a ferroelectric-liquid-crystal-on-silicon (FLCOS) spatial light modulator (SLM) in the production of holograms for use in interferometric metrology. It has already been shown that such a device can be used in producing small-amplitude arbitrary reference surfaces with small but appreciable errors due to the contaminating effect of higher-order structures being propagated through the spatial filter. Here we further quantify the size of these residuals for increasingly large aberrations up to nine waves rms Zernike astigmatism, showing a Zernike-corrected rms wavefront error of roughly 0.06 waves with high vibrational stability. We also present measurements of a vacuum window element using the FLCOS device to drastically reduce interferometric fringe density, showing a residual wavefront error of 0.046 waves rms with dominant components originating from test piece structure rather than holographic errors.

Citation

Cashmore, M., Hall, S., & Love, G. (2014). Traceable interferometry using binary reconfigurable holograms. Applied Optics, 53(24), 5353-5358. https://doi.org/10.1364/ao.53.005353

• Journal Article Type: Article
• Acceptance Date: Jun 29, 2014
• Online Publication Date: Aug 13, 2014
• Publication Date: Aug 13, 2014
• Deposit Date: Oct 1, 2014
• Publicly Available Date: Oct 1, 2014
• Journal: Applied Optics
• Print ISSN: 1559-128X
• Electronic ISSN: 2155-3165
• Publisher: Optica
• Peer Reviewed: Peer Reviewed
• Volume: 53
• Issue: 24
• Pages: 5353-5358
• DOI: https://doi.org/10.1364/ao.53.005353
• Public URL: https://durham-repository.worktribe.com/output/1422997