Development of a flexure-based nano-actuator for high-frequency in-plane directional sensing with atomic force microscopy

Payam, A.F.; Piantanida, L.; Voïtchovsky, K.

Abstract

Scanning probe microscopies typically rely on the high-precision positioning of a nanoscale probe in order to gain local information about the properties of a sample. At a given location, the probe is used to interrogate a minute region of the sample, often relying on dynamical sensing for improved accuracy. This is the case for most force-based measurements in atomic force microscopy (AFM) where sensing occurs with a tip oscillating vertically, typically in the kHz to MHz frequency regime. While this approach is ideal for many applications, restricting dynamical sensing to only one direction (vertical) can become a serious limitation when aiming to quantify the properties of inherently three-dimensional systems, such as a liquid near a wall. Here, we present the design, fabrication, and calibration of a miniature high-speed scanner able to apply controlled fast and directional in-plane vibrations with sub-nanometer precision. The scanner has a resonance frequency of ∼35 kHz and is used in conjunction with a traditional AFM to augment the measurement capabilities. We illustrate its capabilities at a solid–liquid interface where we use it to quantify the preferred lateral flow direction of the liquid around every sample location. The AFM can simultaneously acquire high-resolution images of the interface, which can be superimposed with the directional measurements. Examples of sub-nanometer measurements conducted with the new scanner are also presented.

Citation

Payam, A., Piantanida, L., & Voïtchovsky, K. (2021). Development of a flexure-based nano-actuator for high-frequency in-plane directional sensing with atomic force microscopy. Review of Scientific Instruments, 92(9), Article 093703. https://doi.org/10.1063/5.0057032

• Journal Article Type: Article
• Acceptance Date: Sep 7, 2021
• Online Publication Date: Sep 12, 2021
• Publication Date: 2021-09
• Deposit Date: Sep 16, 2021
• Publicly Available Date: Sep 16, 2021
• Journal: Review of Scientific Instruments
• Print ISSN: 0034-6748
• Electronic ISSN: 1089-7623
• Publisher: American Institute of Physics
• Peer Reviewed: Peer Reviewed
• Volume: 92
• Issue: 9
• Article Number: 093703
• DOI: https://doi.org/10.1063/5.0057032
• Public URL: https://durham-repository.worktribe.com/output/1234303