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Low cost composite PDMS/h-PDMS stamps for nanoimprint lithography

Chandramohan, Abhishek; Cooke, Michael; Mendis, Budhika; Petty, Mike; Gallant, Andrew; Zeze, Dagou

Authors

Michael Cooke

Budhika Mendis

Mike Petty

Dagou Zeze



Citation

Chandramohan, A., Cooke, M., Mendis, B., Petty, M., Gallant, A., & Zeze, D. (2014, December). Low cost composite PDMS/h-PDMS stamps for nanoimprint lithography. Presented at Micro and Nano Engineering (MNE), Lausanne, Switzerland

Presentation Conference Type Conference Paper (published)
Conference Name Micro and Nano Engineering (MNE)
Publication Date 2014
Deposit Date Oct 29, 2014
Public URL https://durham-repository.worktribe.com/output/1154169