Novel TEM sample preparation using XeF2 selective Etching
(2014)
Journal Article
Ambrosini, S. F., Bowen, L., Mendis, B., Cirlin, G., Bouravleuv, A., Gallant, A., …Zeze, D. (2014). Novel TEM sample preparation using XeF2 selective Etching. MRS proceedings, 1659, 149-153. https://doi.org/10.1557/opl.2014.209
We present a new approach to prepare Transmission Electron Microscopy (TEM) nanowire (NW) samples that addresses the core drawbacks of conventional techniques, which are based on mechanical polishing. The proposed method is time efficient and uses Xe... Read More about Novel TEM sample preparation using XeF2 selective Etching.