Atomic layer deposition of Nb-doped ZnO for thin film transistors
(2016)
Journal Article
Shaw, A., Wrench, J., Jin, J., Whittles, T., Mitrovic, I., Raja, M., …Hall, S. (2016). Atomic layer deposition of Nb-doped ZnO for thin film transistors. Applied Physics Letters, 109(22), Article 222103. https://doi.org/10.1063/1.4968194
We present physical and electrical characterization of niobium-doped zinc oxide (NbZnO) for thin film transistor (TFT) applications. The NbZnO films were deposited using atomic layer deposition. X-ray diffraction measurements indicate that the crysta... Read More about Atomic layer deposition of Nb-doped ZnO for thin film transistors.