Non-Planar Photolithography Using Digital Holograms
(2006)
Presentation / Conference Contribution
McWilliam, R., Purvis, A., Johnson, S., Maiden, A., Williams, G., Seed, L., & Ivey, P. (2006). Non-Planar Photolithography Using Digital Holograms.
A photolithographic process using digital holograms enables the fine-pitch patterning of grossly non-planar substrates, with many potential applications in microelectronics packaging. Considerations of hologram design, fabrication and verification pa... Read More about Non-Planar Photolithography Using Digital Holograms.