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Fabrication of metallic magnetic nanostructures by argon ion milling using a reversed polarity planar magnetron ion source (2012)
Journal Article
We demonstrate that a planar magnetron may be used as a source of ions for milling micro- and nanostructured devices. Reversing the polarity of the magnetron head, in combination with applying a voltage bias to the thin-film sample, allows accelerati... Read More about Fabrication of metallic magnetic nanostructures by argon ion milling using a reversed polarity planar magnetron ion source.